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Integrated Process Technology Package

  • TCS Synthese & Distillation
  • Monosilane Synthesis
  • TCS Siemens CVD Technology
  • High pressure STC-TCS conversion
  • Vent Gas Recovery
  • Off Gas Treatment
  • Post processing and filament preparation
  • Analytical Laboratory incl. Lab CVD
  • New FBR-Technology on Monosilane Basis (in R&D)


SiTec integrated process technology packages can be integrated with metallurgical silicon, ingoting & wafering production creating added value in the polysilicon value chain.

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